- ALL
- EPI
- CVD
Chamber Metal Parts
Chamber Metal Parts
0040-46908 BASEPLATE, EXHAUST TOP
0040-46460 BASEPLATE, EXHAUST 5200
0040-76683 COVER, BASEPLATE INJECT TOP
0040-72284 COVER, BASEPLATE INJECT BOTTOM
0040-06477 CLAMP RING, RP EPI
0040-46907 COVER, BASEPLATE EXHAUST BOTTOM
0040-35049 CLAMP RINGG LOWER, ATM / RP/ EPI
0020-35624 RING, CLAMP